Development of novel micro optical diffusion sensor using micro fresnel mirror

T. Oka, K. Itani, Y. Taguchi, Y. Nagasaka

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

We have developed a novel micro optical diffusion sensor (MODS) based on a laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of the protein conformation. We have newly proposed a micro Fresnel mirror (MFM) in order to package a DEP cell and optical components in one chip. MFM, consisting of two angled mirrors, torsion springs, and stiction anchors, can make an excitation laser split into two beams and generate an interference. In this paper, we confirmed the validity of the concept of MFM by the finite element method and the fabricated prototype device.

本文言語English
ホスト出版物のタイトル14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
ページ1292-1294
ページ数3
出版ステータスPublished - 2010 12 1
イベント14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
継続期間: 2010 10 32010 10 7

出版物シリーズ

名前14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
2

Other

Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
国/地域Netherlands
CityGroningen
Period10/10/310/10/7

ASJC Scopus subject areas

  • 制御およびシステム工学

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