Development of the automatic positioning system of microtool edge in micromachining of glass plate for microfluidic chips

Tojiro Aoyama, N. Takahata

研究成果: Article

3 引用 (Scopus)

抄録

A microfluidic chip is a microscale chemical laboratory, and a glass substrate is used for the material of the chip. Micromachining is an effective process to produce a 3D micropattern on such a glass plate. In the micromachining process, however, the positioning of the contact point of the tool edge on the surface of the glass workpiece is technically difficult. In this study, a new automated positioning system for the microtool edge is developed using the total internal reflection of a laser beam. The developed system is also applied to detect the change in the cutting mode from ductile to brittle.

元の言語English
ページ(範囲)551-554
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
59
発行部数1
DOI
出版物ステータスPublished - 2010

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Micromachining
Microfluidics
Glass
Chemical laboratories
Point contacts
Laser beams
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

これを引用

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