Development of the automatic positioning system of microtool edge in micromachining of glass plate for microfluidic chips

T. Aoyama, N. Takahata

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A microfluidic chip is a microscale chemical laboratory, and a glass substrate is used for the material of the chip. Micromachining is an effective process to produce a 3D micropattern on such a glass plate. In the micromachining process, however, the positioning of the contact point of the tool edge on the surface of the glass workpiece is technically difficult. In this study, a new automated positioning system for the microtool edge is developed using the total internal reflection of a laser beam. The developed system is also applied to detect the change in the cutting mode from ductile to brittle.

本文言語English
ページ(範囲)551-554
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
59
1
DOI
出版ステータスPublished - 2010

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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