Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique

Engineering & Materials Science

• Photons 100%
• Tomography 81%
• Electrodes 43%
• Magnetron sputtering 37%
• Mirrors 28%
• Erosion 28%
• Thin films 26%
• Magnetic fields 24%
• Aluminum 21%
• Scanning 21%
• Imaging techniques 21%
• Electric potential 14%
• Experiments 10%

Physics & Astronomy

• tomography 67%
• direct current 66%
• photons 28%
• electrodes 21%
• radial distribution 17%
• erosion 16%
• magnetron sputtering 14%
• chambers 13%
• spacing 13%
• mirrors 12%
• rings 11%
• aluminum 11%
• scanning 10%
• radii 10%
• profiles 9%
• electric potential 9%
• thin films 8%
• magnetic fields 8%

Chemical Compounds

• Photon 81%
• Magnetron Sputtering 32%
• Emission Peak 30%
• Behavior as Electrode 28%
• Magnetic Field 26%
• Voltage 20%
• Pressure 16%
• Surface 8%