Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy

Terukazu Kokubo, Fumiyoshi Tochikubo, Toshiaki Makabe

研究成果: Article査読

31 被引用数 (Scopus)

抄録

The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH4(10%)/H2 under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.

本文言語English
ページ(範囲)818-820
ページ数3
ジャーナルApplied Physics Letters
56
9
DOI
出版ステータスPublished - 1990 12月 1

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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