Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

Ayako Kimura, Hideyuki Kodama, Tetsuya Suzuki

研究成果: Article査読

16 被引用数 (Scopus)

抄録

The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.

本文言語English
ページ(範囲)515-517
ページ数3
ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
21
2
DOI
出版ステータスPublished - 2003 3

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜

フィンガープリント

「Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル