The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.
|ジャーナル||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|出版ステータス||Published - 2003 3|
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