Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

Ayako Kimura; Hideyuki Kodama; Tetsuya Suzuki

doi:10.1116/1.1537717

Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

Ayako Kimura, Hideyuki Kodama, Tetsuya Suzuki

機械工学科

研究成果: Article › 査読

17 被引用数 (Scopus)

抄録

The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.

本文言語	English
ページ（範囲）	515-517
ページ数	3
ジャーナル	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
巻	21
号	2
DOI	https://doi.org/10.1116/1.1537717
出版ステータス	Published - 2003 3月

ASJC Scopus subject areas

凝縮系物理学
表面および界面
表面、皮膜および薄膜

文献へのアクセス

10.1116/1.1537717

他のファイルとリンク

フィンガープリント

「Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

@article{cc8a1429f62845829638e010d3b90260,

title = "Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method",

abstract = "The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.",

author = "Ayako Kimura and Hideyuki Kodama and Tetsuya Suzuki",

year = "2003",

month = mar,

doi = "10.1116/1.1537717",

language = "English",

volume = "21",

pages = "515--517",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Diamond-like carbon films deposited on polyethylene terephthalate substrates by radio frequency plasma chemical vapor deposition method

AU - Kimura, Ayako

AU - Kodama, Hideyuki

AU - Suzuki, Tetsuya

PY - 2003/3

Y1 - 2003/3

N2 - The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.

AB - The diamond like carbon (DLC) films deposited on polyethylene terepthalate substrates using radiofrequency (rf) plasma chemical vapor deposition method were discussed. It was found that when the input power of rf plasma equipment was higher, the C1s x-ray photoelectron spectra from DLC films shifted to high binding energy. The analysis showed that the films were uniformly deposited on PET substrate and had amorphous structure without graphitic structure even in the restricted area.

UR - http://www.scopus.com/inward/record.url?scp=0037356024&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037356024&partnerID=8YFLogxK

U2 - 10.1116/1.1537717

DO - 10.1116/1.1537717

M3 - Article

AN - SCOPUS:0037356024

SN - 0734-2101

VL - 21

SP - 515

EP - 517

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 2

ER -