Diamond synthesis by high-gravity d.c. plasma CVD (HGCVD) with active control of the substrate temperature

Yoshiyuki Abe, Stefano Bellingeri, Giovanni Maizza, Masao Ishizuka, Yuji Nagasaka, Tetsuya Suzuki

研究成果: Article査読

10 被引用数 (Scopus)

抄録

In the first part of this paper, subatmospheric CVD methods for diamond thin film synthesis under normal gravity and other conditions are reviewed, following their increased capability for large-scale manufacturing. Emphasis is given to current problems and advances in moderate pressure d.c. plasma CVD operating under normal gravity and high-gravity. In the second part, an experimental technique aimed at solving the problem of temperature uniformity on the substrate surface at high gravity is presented. This technique improved temperature uniformity during diamond deposition at various gravity conditions and allowed a more accurate assessment of the influence of gravity on diamond growth and thin-film morphology.

本文言語English
ページ(範囲)121-127
ページ数7
ジャーナルActa Astronautica
48
2-3
DOI
出版ステータスPublished - 2001 1月 2

ASJC Scopus subject areas

  • 航空宇宙工学

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