TY - GEN
T1 - Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System
AU - Sugimoto, Takumi
AU - Takahashi, Hidetoshi
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/1
Y1 - 2020/1
N2 - This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.
AB - This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.
KW - Inclined/rotated lithography
KW - Liquid UV curable material
KW - PEGDA
KW - Photolithography
KW - Suction cup
UR - http://www.scopus.com/inward/record.url?scp=85083230018&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85083230018&partnerID=8YFLogxK
U2 - 10.1109/MEMS46641.2020.9056412
DO - 10.1109/MEMS46641.2020.9056412
M3 - Conference contribution
AN - SCOPUS:85083230018
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 925
EP - 927
BT - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Y2 - 18 January 2020 through 22 January 2020
ER -