Direct Fabrication of PEGDA Micro Suction Cup Array Using Inclined/Rotating Mirror Exposure System

Takumi Sugimoto, Hidetoshi Takahashi

研究成果: Conference contribution

抄録

This paper reports on direct fabrication method of a PEGDA micro suction cup array. A micro suction cup has been attracted in many application, however, conventional fabrication method using mold has limitation of the shape of the fabricated structure. The proposed fabrication method realizes a micro suction cup array with single exposure dose by inclined/rotating exposure system. As the suction cup material, UV curable Poly (ethylene glycol) diacrylate (PEGDA) is used due to its suitable characteristics. By controlling the inclined angle and mask pattern, the shape of micro suction cup can be designed. We conducted fabrication experiment of suction cup array of 200 mumathrm{m} in diameter to confirm our proposed method is useful.

本文言語English
ホスト出版物のタイトル33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
出版社Institute of Electrical and Electronics Engineers Inc.
ページ925-927
ページ数3
ISBN(電子版)9781728135809
DOI
出版ステータスPublished - 2020 1
イベント33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
継続期間: 2020 1 182020 1 22

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2020-January
ISSN(印刷版)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
CountryCanada
CityVancouver
Period20/1/1820/1/22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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