Direct observation of hexagonal boron nitride at the grain boundary of cubic boron nitride by high resolution electron microscopy

Wei Lie Zhou, Yuichi Ikuhara, Masao Murakawa, Syuichi Watanabe, Tetsuya Suzuki

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Cubic boron nitride (c-BN) film deposited on a Si substrate was observed by high resolution electron microscopy. Thin layers, 1-2 nm, of hexagonal boron nitride (h-BN) phase were often found at the boundaries of c-BN grains. The observed interplanar spacing was about 0.33 nm, which coincided with that of the (0002) plane of h-BN. The nucleation mechanism of c-BN film is briefly discussed based on the formation of the h-BN phase at the grain boundaries. The existence of the h-BN phase at the boundaries of c-BN grains may be the reason for the occurrence of compressive stress and cracks in c-BN thin films.

本文言語English
ページ数1
ジャーナルApplied Physics Letters
66
出版ステータスPublished - 1995 12 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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