Dissociative mechanisms of monosilane and arsine on copper(II) oxide

Tadaharu Watanabe, Hiroaki Imai, Takashi Suzuki

研究成果: Article査読

9 被引用数 (Scopus)


Chemical reactions of copper(II) oxide (CuO) with monosilane (SiH4) and arsine (AsH3) at room temperature were investigated. Both hydrides were trapped by CuO. Adsorption capacities of CuO for SiH4 and AsH3 were increased in relation to the specific surface areas of CuO. The capacity for AsH3 was estimated to be ten times as large as that for SiH4. From the surface analyses of the CuO exposed to SiH4 and AsH3, arsenic was found to a depth of 30 Å from the surface, although silicon was detected only on the surface. The CuO surface was covered with a Si-O layer formed by the reaction of SiH4 with CuO. Thus, SiH4 did not diffuse into the inner parts of the CuO. On the other hand, AsH3 was considered to have penetrated into the CuO because volatile H2O was formed by the reaction of AsH3 and CuO.

ジャーナルJournal of the Electrochemical Society
出版ステータスPublished - 1996 8月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 再生可能エネルギー、持続可能性、環境
  • 表面、皮膜および薄膜
  • 電気化学
  • 材料化学


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