Effect of a boron additive on the microstructure and dielectric properties of BaTiO3 thin films formed by nanocrystal deposition

Yoko Takezawa, Minoru Ryu, Yoshiki Iwazaki, Toshimasa Suzuki, Youichi Mizuno, Hiroaki Imai

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Highly crystallized BaTiO3 thin films were fabricated by a nanocrystal sintering process. Boron alkoxide was introduced into a slurry of Mn-doped BaTiO3 nanocrystals with particle sizes of 5-7 nm. The deposited nanocrystal film on a (111)-oriented Pt/TiO2/Al 2O3 substrate was sintered at a low temperature of 800 °C and the obtained film had highly densified and oriented microstructures. We found that the boron additive enhanced the grain growth of nanoparticles and as a result the dielectric constant of the thin film increased to 1100 at 10 kHz, which is much higher than that of undoped BaTiO3 thin films.

本文言語English
ホスト出版物のタイトルElectroceramics in Japan XV
出版社Trans Tech Publications Ltd
ページ277-280
ページ数4
ISBN(印刷版)9783037857618
DOI
出版ステータスPublished - 2013
イベント31st Electronics Division Meeting of the Ceramic Society of Japan - Tokyo, Japan
継続期間: 2011 10 282011 10 29

出版物シリーズ

名前Key Engineering Materials
566
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other31st Electronics Division Meeting of the Ceramic Society of Japan
国/地域Japan
CityTokyo
Period11/10/2811/10/29

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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