Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

Kazutoshi Katahira, Hitoshi Ohmori, Shogo Takesue, Jun Komotori, Kazuo Yamazaki

研究成果: Article査読

31 被引用数 (Scopus)

抄録

A study was performed to investigate the effects of the application of an atmospheric-pressure plasma jet during polycrystalline diamond (PCD) micro- end-milling. A comparison was made between SiC surfaces after milling, with and without the application of the plasma jet. The plasma jet was found to allow the formation of a high-quality surface with an average roughness (Ra) of 0.73 nm. The proposed plasma jet is highly effective in improving both the chip formation process, by imparting hydrophilicity to the tool and workpiece surfaces, and removing surface contamination at the tool edge during machining.

本文言語English
ページ(範囲)129-132
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
64
1
DOI
出版ステータスPublished - 2015

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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