TY - JOUR
T1 - Effect of fabrication on high cycle fatigue properties of copper thin films
AU - Park, Jun Hyub
AU - An, Joong Hyok
AU - Kim, Yun Jae
AU - Choi, Hyeon Chang
PY - 2008/8
Y1 - 2008/8
N2 - The influence of fabrication on the tensile and fatigue behavior of copper films manufactured by 3 kinds of fabrication methods was investigated. The tensile and high cycle fatigue tests were performed using the test machine developed by authors. Young's moduli (72, 71 and 69 GPa, respectively) are lower than the literature values (108-145 GPa), while the yield strengths were as high as 358, 350 and 346 MPa, respectively and the ultimate strengths as 462, 456 and 446 MPa, respectively. There is not much difference in the tensile properties of the 3 kinds of films. There is little difference in the fatigue properties of the 3 kinds of films but one of them has shorter fatigue life than others in high cycle region and longer fatigue life than others in low cycle region.
AB - The influence of fabrication on the tensile and fatigue behavior of copper films manufactured by 3 kinds of fabrication methods was investigated. The tensile and high cycle fatigue tests were performed using the test machine developed by authors. Young's moduli (72, 71 and 69 GPa, respectively) are lower than the literature values (108-145 GPa), while the yield strengths were as high as 358, 350 and 346 MPa, respectively and the ultimate strengths as 462, 456 and 446 MPa, respectively. There is not much difference in the tensile properties of the 3 kinds of films. There is little difference in the fatigue properties of the 3 kinds of films but one of them has shorter fatigue life than others in high cycle region and longer fatigue life than others in low cycle region.
KW - copper
KW - high cycle fatigue test
KW - mechanical properties
KW - thin film
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U2 - 10.1007/s10338-008-0837-y
DO - 10.1007/s10338-008-0837-y
M3 - Article
AN - SCOPUS:65449190177
VL - 21
SP - 318
EP - 326
JO - Acta Mechanica Solida Sinica
JF - Acta Mechanica Solida Sinica
SN - 0894-9166
IS - 4
ER -