In this study, we performed Fine Particle Bombardment (FPB) treatment on Ti-6Al-4V alloy surfaces at room temperature, high temperature and low temperature. Treated surface were characterized with surface microstructure, hardness and diffusion phenomena. Diffusion was slightly accelerated in higher temperature and inhibited in lower temperature compared to the room temperature. These phenomena agree with the physical laws of diffusion. Hardness increased extremely in the higher temperature treated specimen. This result suggests that higher temperature treatment improves mechanical properties of the substrate surface. Consequently, processing temperature greatly affects mechanical properties of treated surface and diffusion phenomena induced in the FPB treatment.
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