Operando detection of various physical quantities in electronic devices under operation has been demonstrated by optically detected magnetic resonance (ODMR) using nitrogen vacancy (NV) centers in diamond. However, the ODMR spectrum may also be affected by the existence of the metal electrodes and wirings of the electronic device, which limits the accurate measurement of the objective physical quantity. In this paper, we report the effect of metal electrodes on the ODMR spectrum of NV centers. It was found that the ODMR contrast increased in the vicinity of the metal electrode fabricated on diamond with NV centers. The microwave concentration at the edge of the metal electrode is a plausible cause for the increase in the ODMR contrast. Our results suggest that it is necessary to recognize that the ODMR spectrum may change near the metal electrode and wirings in the ODMR-based operand analysis of electronic devices.
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