Effect of O2(a1Δg) on plasma structures in oxygen radio frequency discharges

Mari Shibata, Nobuhiko Nakano, Toshiaki Makabe

研究成果: Article査読

75 被引用数 (Scopus)

抄録

Oxygen rf glow discharges between parallel plates were numerically analyzed by using the relaxation continuum model. The result at a frequency of 13.56 MHz, sustaining voltage of 150-350 sin ωt V, pressure of 0.15-1.0 Torr, and stainless steel surface, shows that O2(a1Δg) has a number density that is an order of magnitude larger than that of atomic oxygen. The plasma density as a function of pressure has a maximum at about 0.2 Torr, and decreases with increasing pressure due to the increase in the net rate of associative detachment from O- by O2(a1Δg). The comparison between the discharges in two surface materials, stainless steel and copper, indicates that the number densities of O2(a1Δg) and atomic oxygen strongly depend on the surface loss probability, and that consequently the plasma density is also changed by replacing the surface material.

本文言語English
ページ(範囲)6142-6147
ページ数6
ジャーナルJournal of Applied Physics
80
11
DOI
出版ステータスPublished - 1996 12月 1

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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