Effect of substrate temperature on hardness and transparency of SiOC(-H) thin films synthesized by atmospheric pressure plasma enhanced CVD method

Mayui Noborisaka, So Nagashima, Hidetaka Hayashi, Naoharu Ueda, Kyoko Kumagai, Akira Shirakura, Tetsuya Suzuki

研究成果: Conference contribution

1 被引用数 (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy