Effects of bilayer thickness and post-deposition annealing on the mechanical and structural properties of (Ti,Cr,Al)N/(Al,Si)N multilayer coatings

Engineering & Materials Science

• Structural properties 100%
• Annealing 91%
• Multilayers 89%
• Coatings 69%
• Mechanical properties 59%
• Crystal structure 29%
• Hardness 24%
• Thermodynamic stability 15%
• Vacuum furnaces 11%
• Transmission electron microscopy 7%
• X ray diffraction 7%
• Vacuum 6%
• Temperature 6%

Chemical Compounds

• Multilayer 82%
• Annealing 72%
• Coating Agent 55%
• Cubic Space Group 13%
• Vacuum 13%
• Hexagonal Space Group 13%
• Crystal Structure 12%
• Thermal Stability 11%
• Drop 7%
• Transmission Electron Microscopy 5%
• Chemical Transformation 5%
• X-Ray Diffraction 4%
• Mixture 3%

Physics & Astronomy

• coatings 62%
• mechanical properties 61%
• annealing 55%
• hardness 26%
• laminates 23%
• crystal structure 19%
• thermal stability 14%
• vacuum furnaces 11%
• transmission electron microscopy 5%
• vacuum 5%
• diffraction 4%
• x rays 3%
• temperature 2%