Effects of boron contents on microstructures and microhardness in CrxAlyN films synthesized by cathodic arc method

T. Sato, T. Yamamoto, H. Hasegawa, T. Suzuki

研究成果: Article査読

5 被引用数 (Scopus)

抄録

CrxAlyBzN films were synthesized by the cathodic arc method, using CrxAlyBz alloy cathode with differing z values from 0 to 0.10 and investigated with respect to crystal structures, lattice parameters and microhardness. The microhardness of CrxAlyBzN increased from 27 (z = 0) to 33 GPa (z = 0.10). The lattice parameters of CrxAlyBzN decreased from 0.413 (z = 0) to 0.410 nm (z = 0.10), keeping the cubic structure. The columnar structure of CrxAlyBzN disappeared and grain size decreased with incorporations of B atoms. In this study, CrxAlyBzN films were characterized by X-ray and electron microscopy analysis and the relationship between microstructure and microhardness was discussed as a function of B contents.

本文言語English
ページ(範囲)1348-1351
ページ数4
ジャーナルSurface and Coatings Technology
201
3-4
DOI
出版ステータスPublished - 2006 10 5

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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