Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon

Kento Nakanishi, Jun Otsuka, Masanori Hiratsuka, Chen Chung Du, Akira Shirakura, Tetsuya Suzuki

研究成果: Conference contribution

抄録

Diamond-like carbon (DLC) has widespread attention as a new material for its application to thin film solar cells and other semiconducting devices. DLC can be produced at a lower cost than amorphous silicon, which is utilized for solar cells today. However, the electrical properties of DLC are insufficient for this purpose because of many dangling bonds in DLC. To solve this problem, we investigated the effects of the fluorine incorporation on the structural and electrical properties of DLC. We prepared five kinds of fluorinated DLC (F-DLC) thin film with different amounts of fluorine. Films were deposited by the radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. C<inf>6</inf>H<inf>6</inf> and C<inf>6</inf>HF<inf>5</inf> were used as source gases. The total gas flow rate was constant and the gas flow rate ratio R (=C<inf>6</inf>H<inf>6</inf> / (C<inf>6</inf>H<inf>6</inf> + C<inf>6</inf>HF<inf>5</inf>)) was changed from 0 to 1 in 0.25 ratio steps. We also prepared nitrogen doped DLC (F-DLC) on p-Si using N<inf>2</inf> gas as a doping gas to form nitrogen doped DLC (F-DLC) / p-Si heterojunction diodes. X-ray photoelectron spectroscopy (XPS) showed that fluorine concentration in the DLC films was controlled. Moreover, the XPS analysis of the CI s spectrum at R=2/4 showed the presence of CF bonding. At R=l, CF<inf>2</inf> bonding was observed in addition to CF bonding. The sheet resistivity of the films changed from 3.07x10<sup>12</sup> to 4.86><10<sup>9</sup> Ω. The minimum value was obtained at R=2/4. The current-voltage characteristics indicated that nitrogen doped F-DLC of 2/4 and p-Si heterojunction diode exhibited the best rectification characteristics and its energy conversion efficiency had been maximized. This is because of a decrease of dangling bonds density by ESR analysis and an increase of sp<sup>2</sup> structures by Raman analysis. When the fluorine is over certain content, the sheet resistivity increases because chain structures become larger, which is due to the CF<inf>2</inf> bonding in F-DLC prevents ring structures. Many C<inf>2</inf>F<inf>4</inf> species were observed and it may become precursors of the chain structure domains, such as (CF<inf>2</inf>)<inf>n</inf> this study, we revealed effects of fluorine incorporation on DLC and succeeded in increasing its conductivity and improving rectification characteristics of DLC/ p-Si heterojunction diodes. Our results indicate that DLC fluorination is effective for the semiconducting material, such as solar cell applications. copy; 2015 Materials Research Society.

元の言語English
ホスト出版物のタイトルMaterials Research Society Symposium Proceedings
出版者Materials Research Society
ページ40-45
ページ数6
1734
ISBN(印刷物)9781510806153
DOI
出版物ステータスPublished - 2015
イベント2014 MRS Fall Meeting - Boston, United States
継続期間: 2014 11 302014 12 5

Other

Other2014 MRS Fall Meeting
United States
Boston
期間14/11/3014/12/5

Fingerprint

Diamond
Fluorine
fluorine
Structural properties
Diamonds
Electric properties
Carbon
diamonds
electrical properties
carbon
Heterojunctions
Diodes
Dangling bonds
Nitrogen
heterojunctions
Gases
solar cells
diodes
rectification
nitrogen

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

これを引用

Nakanishi, K., Otsuka, J., Hiratsuka, M., Du, C. C., Shirakura, A., & Suzuki, T. (2015). Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon. : Materials Research Society Symposium Proceedings (巻 1734, pp. 40-45). Materials Research Society. https://doi.org/10.1557/opl.2015.306

Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon. / Nakanishi, Kento; Otsuka, Jun; Hiratsuka, Masanori; Du, Chen Chung; Shirakura, Akira; Suzuki, Tetsuya.

Materials Research Society Symposium Proceedings. 巻 1734 Materials Research Society, 2015. p. 40-45.

研究成果: Conference contribution

Nakanishi, K, Otsuka, J, Hiratsuka, M, Du, CC, Shirakura, A & Suzuki, T 2015, Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon. : Materials Research Society Symposium Proceedings. 巻. 1734, Materials Research Society, pp. 40-45, 2014 MRS Fall Meeting, Boston, United States, 14/11/30. https://doi.org/10.1557/opl.2015.306
Nakanishi K, Otsuka J, Hiratsuka M, Du CC, Shirakura A, Suzuki T. Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon. : Materials Research Society Symposium Proceedings. 巻 1734. Materials Research Society. 2015. p. 40-45 https://doi.org/10.1557/opl.2015.306
Nakanishi, Kento ; Otsuka, Jun ; Hiratsuka, Masanori ; Du, Chen Chung ; Shirakura, Akira ; Suzuki, Tetsuya. / Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon. Materials Research Society Symposium Proceedings. 巻 1734 Materials Research Society, 2015. pp. 40-45
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