Effects of second metal contents on microstructure and micro-hardness of ternary nitride films synthesized by cathodic arc method

Hiroyuki Hasegawa, Tetsuya Suzuki

研究成果: Article査読

41 被引用数 (Scopus)

抄録

Current status of ternary nitride films such as Ti1-X AlXN, Ti1-XCrXN, Ti1-X ZrXN, Cr1-XAlXN, Zr1-X AlXN and Ti1-XWXN was briefly summarized focused on micro-hardness with respect to different X value. The cathodic arc method is a specialized method in creating metastable ternary films which cannot be synthesized under stable thermodynamic conditions. The crystal structure and lattice parameter of ternary films change with X value and their physical properties correspondingly change as well. In this paper, the maximum hardness of ternary nitride films with particular X value was discussed based on the phase transition, analyzed by X-ray diffraction (XRD) and scanning and transmission electron microscopy (SEM and TEM).

本文言語English
ページ(範囲)234-240
ページ数7
ジャーナルSurface and Coatings Technology
188-189
1-3 SPEC.ISS.
DOI
出版ステータスPublished - 2004 11

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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