Effects of the Ar and He dilution gas mixture ratio on the hardness of a-C: H films synthesized by atmospheric pressure plasma enhanced chemical vapor deposition

Eiichi Kishimoto, Shunto Maegawa, Akira Shirakura, Tetsuya Suzuki

研究成果: Article査読

1 被引用数 (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds