Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

Engineering & Materials Science

• Acoustic impedance 10%
• Atomic force microscopy 18%
• Electric wiring 62%
• Electrodes 11%
• Graphene 68%
• Integrated circuit interconnects 100%
• Ladders 17%
• Multilayers 55%
• Nanocarbon 25%
• Networks (circuits) 7%
• Sheet resistance 39%
• Transmission electron microscopy 29%

Physics & Astronomy

• atomic force microscopy 8%
• conduction 7%
• electrical resistance 12%
• electrical resistivity 36%
• electrodes 7%
• graphene 47%
• integrated circuits 54%
• ladders 12%
• large scale integration 14%
• probes 6%
• simulation 8%
• transmission electron microscopy 15%
• wiring 73%