抄録
We demonstrate a novel method of processing carbon nanotubes using a variable pressure scanning electron microscope. Lines were processed in a nanotube film by electron beam irradiation in oxygen gas and nitrogen gas. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. In this experiment, the narrowest line width of 120 nm was achieved in a nitrogen atmosphere.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 2356-2360 |
| ページ数 | 5 |
| ジャーナル | Journal of Nanoscience and Nanotechnology |
| 巻 | 7 |
| 号 | 7 |
| DOI | |
| 出版ステータス | Published - 2007 7月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- バイオエンジニアリング
- 化学 (全般)
- 生体医工学
- 材料科学（全般）
- 凝縮系物理学