Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Koichiro Iwasa; Tetsuhiko Isobe; Mamoru Senna

doi:10.1016/s0167-2738(97)00231-2

Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

Koichiro Iwasa, Tetsuhiko Isobe, Mamoru Senna

応用化学科

研究成果: Article › 査読

7 被引用数 (Scopus)

抄録

Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In₂O₃ 95/SnO₂ 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO₂ above 1200 °C.

本文言語	English
ページ（範囲）	71-78
ページ数	8
ジャーナル	Solid State Ionics
巻	101-103
号	PART 1
DOI	https://doi.org/10.1016/s0167-2738(97)00231-2
出版ステータス	Published - 1997 11月

ASJC Scopus subject areas

化学 (全般)
材料科学（全般）
凝縮系物理学

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10.1016/s0167-2738(97)00231-2

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title = "Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing",

abstract = "Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.",

keywords = "Sputter target, Surface reaction layer, Wet grinding",

author = "Koichiro Iwasa and Tetsuhiko Isobe and Mamoru Senna",

year = "1997",

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doi = "10.1016/s0167-2738(97)00231-2",

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AU - Iwasa, Koichiro

AU - Isobe, Tetsuhiko

AU - Senna, Mamoru

PY - 1997/11

Y1 - 1997/11

N2 - Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.

AB - Changes in the sinterability of indium-tin oxide (ITO) due to mechanical stressing of In2O3 95/SnO2 5 mixture have been studied. Starting composite powders were prepared by in situ sol preparation method using an agitation beads mill. The enhanced sinterability due to mechanical treatment is explained by the dissolution-reprecipitation to form a layer of hydrogels, resulting in the decrease in the vaporization rate of SnO2 above 1200 °C.

KW - Sputter target

KW - Surface reaction layer

KW - Wet grinding

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VL - 101-103

SP - 71

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JO - Solid State Ionics

JF - Solid State Ionics

IS - PART 1

ER -

Enhanced densification of indium-tin oxide ceramics for sputter target through wet mechanochemical processing

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ASJC Scopus subject areas

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