Enhancement of Kr2 Excimer Generation in a Pulsed Rare-Gas Jet Discharge with H2 Gas Contact Cooling

T. Itoh, Y. Sunada, F. Kannari

研究成果: Article査読

抄録

A novel excitation scheme for Kr2 rare-gas excimer formation is developed. A pulse discharge excited Kr jet is dynamically mixed with a H2neutral gas flow located downstream in a vacuum chamber. Rapid contact cooling of the high temperature Kr plasma jet by H2 gas collisions increases the Kr2excimer emission at 148 nm by a factor of more than three compared with that observed without the cooling downstream. Significant decreases of both electron temperature and density in the Kr plasma when mixed with H2gases downstream are measured with time-resolved spectroscopic methods.

本文言語English
ページ(範囲)210-216
ページ数7
ジャーナルIEEE Transactions on Plasma Science
22
2
DOI
出版ステータスPublished - 1994 4月

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 凝縮系物理学

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