Enhancement of rotordynamic performance of high-speed micro-rotors for power MEMS applications by precision deep reactive ion etching

Physics & Astronomy

• rotor dynamics 100%
• rotors 62%
• microelectromechanical systems 60%
• etching 47%
• high speed 47%
• augmentation 38%
• ions 29%
• performance 27%
• nonuniformity 13%
• rotor blades 9%
• pressure chambers 8%
• circumferences 8%
• geometry 7%
• metal spinning 6%
• proximity 6%
• manufacturing 5%
• wafers 5%
• fabrication 4%
• microstructure 4%
• silicon 3%

Engineering & Materials Science

• Reactive ion etching 84%
• MEMS 57%
• Rotors 45%
• Ions 17%
• Geometry 7%
• Fourier transforms 6%
• Plasmas 5%
• Silicon 4%
• Fabrication 4%
• Microstructure 4%
• Experiments 2%

Chemical Compounds

• Etching 56%
• Ion 24%
• Application 19%
• Microstructure 14%
• Plasma 12%
• Pressure 12%