Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Akimasa Yamada; Paul J. Fons; Keiichiro Sakurai; Koji Matsubara; Kakuya Iwata; Shigeru Niki

doi:10.1143/jjap.42.5811

Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

Akimasa Yamada, Paul J. Fons, Keiichiro Sakurai, Koji Matsubara, Kakuya Iwata, Shigeru Niki

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

本文言語	English
ページ（範囲）	5811-5812
ページ数	2
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	42
号	9 A
DOI	https://doi.org/10.1143/jjap.42.5811
出版ステータス	Published - 2003 9月
外部発表	はい

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/jjap.42.5811

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title = "Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis",

abstract = "The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.",

keywords = "EPMA, Electron probe microanalysis, Inclination, Surface roughness",

author = "Akimasa Yamada and Fons, {Paul J.} and Keiichiro Sakurai and Koji Matsubara and Kakuya Iwata and Shigeru Niki",

year = "2003",

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T1 - Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

AU - Yamada, Akimasa

AU - Fons, Paul J.

AU - Sakurai, Keiichiro

AU - Matsubara, Koji

AU - Iwata, Kakuya

AU - Niki, Shigeru

PY - 2003/9

Y1 - 2003/9

N2 - The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

AB - The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.

KW - EPMA

KW - Electron probe microanalysis

KW - Inclination

KW - Surface roughness

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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ER -

Estimation and correction procedure for the effects of surface roughness on electron probe microanalysis

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