Evaluation of p-type 4H-SiC piezoresistance coefficients in (0001) plane using numerical simulation

Takaya Sugiura, Naoki Takahashi, Nobuhiko Nakano

研究成果: Conference contribution

抄録

A numerical simulation of p-type 4H-Silicon Carbide (4H-SiC) piezoresistance coefficients in (0001) plane evaluation is shown in this study. A 4H-SiC material has outstanding material characteristics of wide band-gap of 3.26 eV and high temperature robustness. However, many material properties of 4H-SiC material are still unknown, including piezoresistance coefficients. Piezoresistive effect is resistivity change when mechanical stress is applied to the material. Piezoresistance coefficients express the magnitude of this effect, important for designing a mechanical stress sensor. In this study, reported piezoresistance coefficients of p-type 4H-SiC in (0001) plane is evaluated based on numerical simulation. The simulated results of Gauge Factor (GF) values (determined by (ΔR/R)/ε (R is the resistance and ε is the strain of material)) well matched to the theoretical GF values (determined by πE (π is the piezoresistance coefficient and E is Young’s modulus of the material)), shows that reported piezoresistance coefficients are reliable. Also, the internal mappings of piezoresistive effect from the numerical simulation are shown, useful to understand piezoresistive effect which is difficult to see by experimental results.

本文言語English
ホスト出版物のタイトルSilicon Carbide and Related Materials 2019
編集者Hiroshi Yano, Takeshi Ohshima, Kazuma Eto, Takeshi Mitani, Shinsuke Harada, Yasunori Tanaka
出版社Trans Tech Publications Ltd
ページ249-255
ページ数7
ISBN(印刷版)9783035715798
DOI
出版ステータスPublished - 2020
イベント18th International Conference on Silicon Carbide and Related Materials, ICSCRM 2019 - Kyoto, Japan
継続期間: 2019 9 292019 10 4

出版物シリーズ

名前Materials Science Forum
1004 MSF
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

Conference

Conference18th International Conference on Silicon Carbide and Related Materials, ICSCRM 2019
国/地域Japan
CityKyoto
Period19/9/2919/10/4

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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