Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator

研究成果: Article査読

20 被引用数 (Scopus)

抄録

The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF2) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF2 optical micro-resonators. In this study, the influence of subsurface damage on the resonator's Q factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.

本文言語English
ページ(範囲)117-120
ページ数4
ジャーナルCIRP Annals
64
1
DOI
出版ステータスPublished - 2015

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学

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