Experimental Study of Very-High-Frequency Plasmas in H2 by Spatiotemporally Resolved Optical Emission Spectroscopy

Shigeru Kakuta, Takeshi Kitajima, Yutaka Okabe, Toshiaki Makabe

研究成果: Article査読

13 被引用数 (Scopus)

抄録

A very-high-frequency (VHF) plasma at 100 MHz is experimentally investigated in parallel-plate configuration in H2 using spatiotemporal optical emission spectroscopy and current-voltage-power waveforms. The observed optical emission intensity and net excitation rate profiles have strong temporal and spatial variations. The VHF plasma is still capacitive, and is maintained by reflected electrons in the oscillating sheath next to the instantaneous cathode. The characteristics of VHF plasmas, that the excitation rate increases in proportion to the square of driving frequency, and that the minimum sustaining voltage and pressure decrease with increasing frequency, are experimentally confirmed at pressures, ranging from 0.01 to 2 Torr and at the frequency of 100 MHz.

本文言語English
ページ(範囲)4335
ページ数1
ジャーナルJapanese journal of applied physics
33
7S
DOI
出版ステータスPublished - 1994 7月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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