Fabrication method for nanocluster superatoms with high-power impulse magnetron sputtering

Engineering & Materials Science

• Nanoclusters 100%
• Magnetron sputtering 77%
• Fabrication 42%
• Ions 22%
• Sputtering 21%
• Ion sources 12%
• Transition metals 12%
• Palladium 10%
• Platinum 9%
• Silver 8%
• Nucleation 8%
• Atoms 8%
• Flow of gases 7%
• Silicon 6%
• Tuning 6%
• Temperature 3%

Physics & Astronomy

• nanoclusters 63%
• impulses 52%
• magnetron sputtering 48%
• fabrication 35%
• sputtering 12%
• palladium 8%
• ion currents 8%
• ion sources 8%
• platinum 8%
• selectivity 7%
• ions 7%
• gas flow 7%
• low pressure 6%
• transition metals 6%
• silver 6%
• direct current 6%
• reactors 6%
• tuning 6%
• nucleation 6%
• silicon 4%
• atoms 4%

Chemical Compounds

• Magnetron Sputtering 66%
• Sputtering 17%
• Ion 13%
• Nucleation 6%
• Palladium 6%
• Platinum 6%
• Transition Element 5%