Fabrication of 70-nm-diameter carbon nanotube via interconnects by remote plasma-Enhanced chemical vapor deposition and their electrical properties

Masayuki Katagiri, Yuichi Yamazaki, Naoshi Sakuma, Mariko Suzuki, Tadashi Sakai, Makoto Wada, Naofumi Nakamura, Noriaki Matsunaga, Shintaro Sato, Mizuhisa Nihei, Yuji Awano

研究成果: Conference contribution

20 引用 (Scopus)

抜粋

We have succeeded in fabricating ultrafine carbon nanotube (CNT) via interconnects with SiOC interlayer dielectrics. High-quality multiwalled CNTs are grown in via holes with a diameter of 70 nm using pulse-exited remote plasma-enhanced chemical vapor deposition at 450 °C. The resistance of a 70-nm-diameter CNT via is 52ω, which is the lowest ever reported for CNT via interconnects. The CNT via interconnect has the capability to sustain current density as high as 1×108 A/cm2.

元の言語English
ホスト出版物のタイトルProceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009
ページ44-46
ページ数3
DOI
出版物ステータスPublished - 2009 10 1
外部発表Yes
イベント2009 IEEE International Interconnect Technology Conference, IITC 2009 - Sapporo, Hokkaido, Japan
継続期間: 2009 6 12009 6 3

出版物シリーズ

名前Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009

Other

Other2009 IEEE International Interconnect Technology Conference, IITC 2009
Japan
Sapporo, Hokkaido
期間09/6/109/6/3

    フィンガープリント

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

これを引用

Katagiri, M., Yamazaki, Y., Sakuma, N., Suzuki, M., Sakai, T., Wada, M., Nakamura, N., Matsunaga, N., Sato, S., Nihei, M., & Awano, Y. (2009). Fabrication of 70-nm-diameter carbon nanotube via interconnects by remote plasma-Enhanced chemical vapor deposition and their electrical properties. : Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009 (pp. 44-46). [5090336] (Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009). https://doi.org/10.1109/IITC.2009.5090336