Fabrication of micro lens array by UV-LED lithography

Yusuke Iguchi, Yoshinori Matsumoto

研究成果: Article査読

1 被引用数 (Scopus)

抄録

High curvature micro lens array of 240-570 μm diameters and 110-270 μm heights has been fabricated by using UV-LED lithography and imprinting technique. Curved SU-8 structures were fabricated by backside exposure through thin glass substrate because UV-LED array light source has wide directivity characteristics of UV dose. The structure was transferred to Polydimethylsiloxsane (PDMS) mold. Micro lens array of photosensitive acrylic resin was fabricated by using the mold.

本文言語English
ページ(範囲)363-364
ページ数2
ジャーナルieej transactions on sensors and micromachines
129
10
DOI
出版ステータスPublished - 2009

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「Fabrication of micro lens array by UV-LED lithography」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル