Fabrication of micro lens array by UV-LED lithography

Yusuke Iguchi, Yoshinori Matsumoto

研究成果: Article

1 引用 (Scopus)

抜粋

High curvature micro lens array of 240-570 μm diameters and 110-270 μm heights has been fabricated by using UV-LED lithography and imprinting technique. Curved SU-8 structures were fabricated by backside exposure through thin glass substrate because UV-LED array light source has wide directivity characteristics of UV dose. The structure was transferred to Polydimethylsiloxsane (PDMS) mold. Micro lens array of photosensitive acrylic resin was fabricated by using the mold.

元の言語English
ページ(範囲)363-364
ページ数2
ジャーナルieej transactions on sensors and micromachines
129
発行部数10
DOI
出版物ステータスPublished - 2009 11 26

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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