Fabrication of periodic metal nanowire grating and dotted structures on silica substrate by femtosecond laser irradiation

Y. Nakajima, M. Terakawa

    研究成果: Conference contribution

    抄録

    A method to fabricate metal nanowire gratings and dotted structures on substrates by using femtosecond laser is proposed and experimentally demonstrated. By irradiating femtosecond laser pulses to a platinum thin film deposited on a fused silica substrate, platinum nanowire gratings, which periodicities were comparable to or less than half the laser wavelength, were fabricated. The structures were experimentally analyzed with scanning electron microscopy (SEM), cross sectional imaging with focused ion beam (FIB), and atomic force microscopy (AFM). Moreover, dotted structures were formed in a self-organized manner by changing the number of pulses. The method presented has potential to be used as a simple and high-throughput process for fabrication of metal nanostructures for optical, electrical, and biomedical devices.

    本文言語English
    ホスト出版物のタイトルLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
    編集者Stephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
    出版社SPIE
    ISBN(電子版)9781628414400
    DOI
    出版ステータスPublished - 2015 1 1
    イベントLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, United States
    継続期間: 2015 2 92015 2 12

    出版物シリーズ

    名前Proceedings of SPIE - The International Society for Optical Engineering
    9350
    ISSN(印刷版)0277-786X
    ISSN(電子版)1996-756X

    Other

    OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
    CountryUnited States
    CitySan Francisco
    Period15/2/915/2/12

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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