Fabrication of Si nanostructures for single electron device applications by anisotropic etching

Engineering & Materials Science

• Anisotropic etching 100%
• Electron devices 99%
• Nanostructures 78%
• VLSI circuits 50%
• Fabrication 47%
• Atomic force microscopy 27%
• Lithography 23%
• Oxidation 18%
• Scanning electron microscopy 16%

Physics & Astronomy

• very large scale integration 76%
• etching 48%
• fabrication 38%
• electrons 27%
• lithography 26%
• chips 25%
• atomic force microscopy 24%
• oxidation 23%
• scanning electron microscopy 20%