Fabrication of Transparent ZnO Thick Film with Unusual Orientation by the Chemical Bath Deposition

Takahiro Morita, Shintaro Ueno, Takashi Tokunaga, Eiji Hosono, Yuya Oaki, Hiroaki Imai, Hirofumi Matsuda, Haoshen Zhou, Manabu Hagiwara, Shinobu Fujihara

研究成果: Article査読

10 被引用数 (Scopus)


We report a fabrication of transparent ZnO thick films by a chemical bath deposition using zinc acetate ethanolic-aqueous solutions with cetyltrimethylammonium chloride (CTAC). In this system, CTAC plays a particular role in nucleation and crystal growth of ZnO, and the micrometer-thick ZnO films formed on ZnO-buffered glass substrates. The resultant ZnO thick films show a high transmittance of around 80% in the visible region. An orientation of ZnO nuclei formed on the substrates in the early stage is different from a c-axis orientation of the ZnO-buffer layer, and the resultant ZnO thick films also show the unusual orientation. The detailed information on the orientation of these ZnO films was analyzed based on X-ray diffraction (XRD) 2θ/θ scan measurements at angles between in-plane and out-of-plane geometries. According to the results, the c-axis of ZnO is tilted at around 40-50° with respect to the film normal, and the micrometer-thick ZnO films exhibit the (112)-plane orientation by adjusting the CTAC concentration of reaction solutions.

ジャーナルCrystal Growth and Design
出版ステータスPublished - 2015 7月 1

ASJC Scopus subject areas

  • 化学 (全般)
  • 材料科学(全般)
  • 凝縮系物理学


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