Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch

Jun Hyub Park, Chang Seung Lee, Yun Jae Kim

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and -0.1514, respectively.

本文言語English
ホスト出版物のタイトルAdvances in Safety and Structural Integrity 2005 - Proceedings of the International Symposium on Safety and Structural Integrity
出版社Trans Tech Publications Ltd
ページ3-8
ページ数6
ISBN(印刷版)3908451159, 9783908451150
DOI
出版ステータスPublished - 2006
外部発表はい
イベントInternational Symposium on Safety and Structural Integrity - Singapore, Singapore
継続期間: 2005 1 172005 1 20

出版物シリーズ

名前Solid State Phenomena
110
ISSN(印刷版)1012-0394

Conference

ConferenceInternational Symposium on Safety and Structural Integrity
国/地域Singapore
CitySingapore
Period05/1/1705/1/20

ASJC Scopus subject areas

  • 原子分子物理学および光学
  • 材料科学(全般)
  • 凝縮系物理学

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