Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, Mitsuhiro Terakawa

    研究成果: Conference contribution

    抄録

    We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

    本文言語English
    ホスト出版物のタイトルFrontiers in Ultrafast Optics
    ホスト出版物のサブタイトルBiomedical, Scientific, and Industrial Applications XIX
    編集者Michel Meunier, Peter R. Herman, Roberto Osellame
    出版社SPIE
    ISBN(電子版)9781510624580
    DOI
    出版ステータスPublished - 2019 1 1
    イベントFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 - San Francisco, United States
    継続期間: 2019 2 22019 2 5

    出版物シリーズ

    名前Proceedings of SPIE - The International Society for Optical Engineering
    10908
    ISSN(印刷版)0277-786X
    ISSN(電子版)1996-756X

    Conference

    ConferenceFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019
    CountryUnited States
    CitySan Francisco
    Period19/2/219/2/5

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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