Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, Mitsuhiro Terakawa

研究成果: Conference contribution

抄録

We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

本文言語English
ホスト出版物のタイトルFrontiers in Ultrafast Optics
ホスト出版物のサブタイトルBiomedical, Scientific, and Industrial Applications XIX
編集者Roberto Osellame, Peter R. Herman, Michel Meunier
出版社SPIE
ISBN(電子版)9781510624580
DOI
出版ステータスPublished - 2019
イベントFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 - San Francisco, United States
継続期間: 2019 2月 22019 2月 5

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
10908
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

Conference

ConferenceFrontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019
国/地域United States
CitySan Francisco
Period19/2/219/2/5

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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