Near-field processing technology mediated with nanotemplates enables one to obtain high-throughput nanopatterning with nanoscale size and spacing. The method with nanoparticle templates leads to precise nanohole patterning. This fabrication technology is classified broadly according to particle materials: metallic (plasmonic) particle and dielectric (nonplasmonic) particle. In this paper, we present a comparative study between near-field enhancement with metallic particle and dielectric particle. Following the comparative study, we demonstrate nanoablation using Mie resonance high dielectric constant small particles.