Femtosecond laser processing using subwavelength thin metal slit arrays

Akifumi Moroki, Riichi Kitano, Minoru Obara, Hiroyuki Tsuda

研究成果: Article

5 引用 (Scopus)

抜粋

We have studied femtosecond laser processing using subwavelength thin metal slits patterned onto Si substrates. A thin Ta film (200nm thickness) with a periodic-structured slit array (200-1000nm width) was formed on the Si substrates. The ablation thresholds of the Ta and Si were investigated. Near-field enhancement effects were observed at the edge of the metal slit arrays. Ridge structures were created in the slits on the Si surfaces using a single laser shot. In addition, an interesting processing effect was observed that was dependent on the polarization of the beam; only a p-polarized beam could create grooves perpendicular to the slits on the Si substrate. The grooves were formed under the metal layer. Our experimental results concerning the enhancement of the electrical field at the edge of the slits were consistent with the results from finite-difference time-domain simulations.

元の言語English
ページ(範囲)8753-8758
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
44
発行部数12
DOI
出版物ステータスPublished - 2005 12 8

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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