Ferroelectric BaTiO3 thin-film technology compatible with LTCC process for integrated RF modules

F. Nakasone, T. Suzuki, K. Kobayashi, K. Kawamura, Y. Mizuno, H. Kishi, H. Chazono, H. Imai

研究成果: Conference contribution

抄録

A novel powder-sintering thin film process using single nanosized particles of sol-gel-derived crystalline BaTiO3 without the sintering additives obtains a highly densified microstructure containing columnar-like grains at lower temperatures of 800°C. The BaTiO3 thin film fabricated on a (lll)-oriented Pt electrode shows high crystallinity, which is desirable for microwave tunable applications, and a relatively high dielectric constant of 635 at 10 kHz with a low loss tangent of 0.007. Furthermore, its two-dimensional reciprocal space map revealed the possibility of the crystallographic orientation control for the nanoparticle-derived BaTiO 3 thin film.

本文言語English
ホスト出版物のタイトルMaterials Science and Technology Conference and Exhibition MS and T'08
ページ254-261
ページ数8
出版ステータスPublished - 2008
イベントMaterials Science and Technology Conference and Exhibition, MS and T'08 - Pittsburgh, PA, United States
継続期間: 2008 10 52008 10 9

出版物シリーズ

名前Materials Science and Technology Conference and Exhibition, MS and T'08
1

Other

OtherMaterials Science and Technology Conference and Exhibition, MS and T'08
国/地域United States
CityPittsburgh, PA
Period08/10/508/10/9

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学

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