Flexible distributed capacitive sensor with encapsulated ferroelectric liquid

Y. Hotta, Y. Zhang, N. Miki

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

We demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate DI water as dielectric. DI water, which is a ferroelectric liquid and has a relative dielectric constant of approximately 80, could increase the capacitance of the sensor and enhance the sensitivity while maintaining flexibility of the sensor with electrodes patterned on flexible PDMS substrates. The proposed sensor was microfabricated and demonstrated successfully 40 times greater sensitivity than sensors without DI water. Since DI water is incompressible fluid, it restricted the displacements of the electrodes. We designed a reservoir of DI water where the DI water between the electrodes could escape, which allowed more deformation of the PDMS substrates and successfully augmented the sensitivity of the proposed sensor.

本文言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ573-576
ページ数4
DOI
出版ステータスPublished - 2011 4 13
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1 232011 1 27

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
国/地域Mexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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