Several deposition techniques and the characteristics of fluorocarbon (FC) films have been investigated. At first, FC film was spin-coated from Cyclized Perfluoro Polymer (CPFP) commercialized as CYTOP. Because of the excellent durability for alkali or acid, the FC film was used for protection of circuit area of integrated accelerometer during silicon alkaline etching process by 25 wt% TMAH at 90 °C. Second, FC films were formed on a field-free zone with a capacitive coupling type plasma polymerization equipment using perfluorinated liquid (C7F16,C8F18 etc.) as monomer species. The deposition rate and thermal stability of the films were investigated. The FC films are effective for elimination of in-use stiction for surface micromachining devices.
|出版ステータス||Published - 1997 1月 1|
|イベント||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA|
継続期間: 1997 6月 16 → 1997 6月 19
|Other||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)|
|City||Chicago, IL, USA|
|Period||97/6/16 → 97/6/19|
ASJC Scopus subject areas