Force controller design based on PQ method for dual-stage actuators in polishing machines

Kenta Seki, Yusaku Shinohara, Makoto Iwasaki, Hiroshi Chinda, Masaki Takahashi

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper presents a controller design approach to realize a precise force control of load devices in polishing machines. In the load device, a pneumatic actuator and a voice coil motor are combined as dual-stage actuators to expand the servo bandwidth. However, the interference between the dual actuators may deteriorate the servo performance, especially at around the cross-over frequency. In this paper, therefore, PQ method is adopted to achieve the high precision force control by the expansion of servo bandwidth, where the compensators are especially designed to suppress the interference. The proposed approach has been verified by experiments using an actual load device of the polishing machine.

本文言語English
ホスト出版物のタイトルProceedings
ホスト出版物のサブタイトルIECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
ページ3388-3393
ページ数6
DOI
出版ステータスPublished - 2011 12 1
外部発表はい
イベント37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia
継続期間: 2011 11 72011 11 10

出版物シリーズ

名前IECON Proceedings (Industrial Electronics Conference)

Other

Other37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
国/地域Australia
CityMelbourne, VIC
Period11/11/711/11/10

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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