TY - GEN
T1 - Frequency comb generation in a silicon nitride microring resonator fabricated by using hot-wire CVD method
AU - Sota, Shota
AU - Handa, Koichiro
AU - Tanabe, Takasumi
AU - Uzawa, Yoshinori
AU - Furusawa, Kentaro
AU - Sekine, Norihiko
N1 - Funding Information:
We successfully demonstrated frequency comb generation using a SiN-based microresonator fabricated by using the low-temperature HW-CVD method. The intrinsic quality factor as high as 5.4×105 was achieved in the C-band. These results highlight interesting opportunities offered by the HW-CVD method for microcomb device fabrication. A part of this study was supported by JSPS KAKENHI Grant Number JP17K06410.
Publisher Copyright:
© Optica Publishing Group 2022, © 2022 The Author(s)
PY - 2022
Y1 - 2022
N2 - We
AB - We
UR - http://www.scopus.com/inward/record.url?scp=85136790547&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85136790547&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85136790547
T3 - Optics InfoBase Conference Papers
BT - CLEO
PB - Optica Publishing Group (formerly OSA)
T2 - CLEO: Science and Innovations, S and I 2022
Y2 - 15 May 2022 through 20 May 2022
ER -