Frequency-specific highly sensitive acoustic sensor using a piezoresistive cantilever element and parallel Helmholtz resonators

Physics & Astronomy

• Helmholtz resonators 100%
• differential pressure 55%
• pressure sensors 45%
• sensors 43%
• acoustics 41%
• resonant frequencies 36%
• sensitivity 24%
• resonators 15%
• caps 10%
• elastic waves 10%
• chips 8%
• frequency ranges 7%

Engineering & Materials Science

• Resonators 67%
• Acoustics 58%
• Pressure sensors 43%
• Sensors 36%
• Natural frequencies 34%
• Acoustic resonators 16%
• Acoustic waves 16%
• Electric power utilization 7%

Chemical Compounds

• Pressure Sensor 75%
• Sound Property 51%
• Pressure 20%
• Wave 16%
• Dimension 13%
• Block Like Crystal 12%
• Time 6%
• Application 5%