CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron sputtering system via adjusting the trimethylsilane (TMS) flows, and their composition, microstructure and nano-hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), scanning electron microscopy (SEM) and nano-indenter, respectively. The friction behaviors sliding against SiC and SUS440C balls in water were investigated. The results showed that the CrSiCN coatings presented nanocomposite microstructure of Cr(C, N) nanocrystallites embedded into amorphous matrix of Si-C-N. The coatings showed maximum hardness (19.1 GPa) deposited at the TMS flow of 10 sccm. Compared with different mating balls, the CrSiCN/SiC tribopairs exhibited better friction and wear properties than that of the CrSiCNS/SUS440C steel tribopairs in water.
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