Friction and wear properties of CrSiCN coatings with low carbon content as sliding against SiC and steel balls in water

Zhiwei Wu, Fei Zhou, Kangmin Chen, Qianzhi Wang, Zhifeng Zhou, Jiwang Yan, Lawrence Kwok-Yan Li

研究成果: Article査読

31 被引用数 (Scopus)

抄録

CrSiCN coatings were deposited on Si wafer and 316L stainless steels by using unbalanced magnetron sputtering system via adjusting the trimethylsilane (TMS) flows, and their composition, microstructure and nano-hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), scanning electron microscopy (SEM) and nano-indenter, respectively. The friction behaviors sliding against SiC and SUS440C balls in water were investigated. The results showed that the CrSiCN coatings presented nanocomposite microstructure of Cr(C, N) nanocrystallites embedded into amorphous matrix of Si-C-N. The coatings showed maximum hardness (19.1 GPa) deposited at the TMS flow of 10 sccm. Compared with different mating balls, the CrSiCN/SiC tribopairs exhibited better friction and wear properties than that of the CrSiCNS/SUS440C steel tribopairs in water.

本文言語English
ページ(範囲)176-186
ページ数11
ジャーナルTribology International
94
DOI
出版ステータスPublished - 2016 2 12

ASJC Scopus subject areas

  • 材料力学
  • 機械工学
  • 表面および界面
  • 表面、皮膜および薄膜

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