Fully automatic spray-LBL machine with monitoring the real time growth of multilayer films using quartz crystal microbalance

S. Shiratori, N. Fukao, K. H. Kyung

研究成果: Conference article査読

抄録

A fully automatic spray-LBL machine with monitoring the real time growth of multilayer films using Quartz Crystal Microbalance (QCM) techniques was newly developed. We established fully automatic spray layer-by-layer method by precisely controlling air pressure, solution flow, and spray pattern. The movement pattern towards the substrate during solution spraying allowed fabrication of a nano-scale, flat, thin film over a wide area. Optimization of spray conditions permitted fabrication of the flat film with high and low refractive indexes, and they were piled up alternatively to constitute a one-dimensional photonic crystal with near-infrared reflection characteristics. The heat shield effect of the near-infrared reflective film was also confirmed under natural sunlight. It was demonstrated that the fabrication using the automatic spray-LBL machine and real-time QCM monitoring allows the fabrication of optical quality thin films with precise thickness.

本文言語English
論文番号03003
ジャーナルMATEC Web of Conferences
4
DOI
出版ステータスPublished - 2013
外部発表はい
イベント14th International Conference on Organized Molecular Films, ICOMF 2013 - Paris, France
継続期間: 2013 7月 102013 7月 13

ASJC Scopus subject areas

  • 化学 (全般)
  • 材料科学(全般)
  • 工学(全般)

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