Functional separation in two frequency operation of an inductively coupled plasma

T. Denda, Y. Miyoshi, Y. Komukai, T. Goto, Z. Lj Petrović, T. Makabe

研究成果: Article査読

62 被引用数 (Scopus)

抄録

A study was conducted on the inductively coupled plasma characteristics in pure Ar and CF4(5%)/Ar in front of the biased electrode that was 65 mm away from the coil. A set of measurements was performed including the 3D profiles of short lived 2pi state and the metastables towards more nonuniform profiles as pressure increases. As a result, very small effect of the gas flow was observed in the present chamber.

本文言語English
ページ(範囲)870-876
ページ数7
ジャーナルJournal of Applied Physics
95
3
DOI
出版ステータスPublished - 2004 2月 1

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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