Functional separation in two frequency operation of an inductively coupled plasma

T. Denda, Y. Miyoshi, Y. Komukai, T. Goto, Z. Lj Petrović, T. Makabe

研究成果: Article

59 引用 (Scopus)

抜粋

A study was conducted on the inductively coupled plasma characteristics in pure Ar and CF4(5%)/Ar in front of the biased electrode that was 65 mm away from the coil. A set of measurements was performed including the 3D profiles of short lived 2pi state and the metastables towards more nonuniform profiles as pressure increases. As a result, very small effect of the gas flow was observed in the present chamber.

元の言語English
ページ(範囲)870-876
ページ数7
ジャーナルJournal of Applied Physics
95
発行部数3
DOI
出版物ステータスPublished - 2004 2 1

    フィンガープリント

ASJC Scopus subject areas

  • Physics and Astronomy(all)

これを引用

Denda, T., Miyoshi, Y., Komukai, Y., Goto, T., Petrović, Z. L., & Makabe, T. (2004). Functional separation in two frequency operation of an inductively coupled plasma. Journal of Applied Physics, 95(3), 870-876. https://doi.org/10.1063/1.1636527