Fusion of cantilever and diaphragm pressure sensors according to frequency characteristics

Ryo Watanabe, Nguyen Minh-Dung, Hidetoshi Takahashi, Tomoyuki Takahata, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference article査読

3 被引用数 (Scopus)

抄録

This paper reports on an approach to measure sensitive barometric pressure by fusing a cantilever-based differential pressure sensor (DPS) and a commercially available diaphragm-based absolute pressure sensor (APS). At high frequency, the DPS can detect smaller pressure change than the APS. At low frequency, the APS shows less drift absolute pressure than the DPS. By utilizing the DPS and APS at each advantageous frequency, we propose a highly sensitive and drift-free measurement of barometric pressure.

本文言語English
論文番号7050924
ページ(範囲)212-214
ページ数3
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015-February
February
DOI
出版ステータスPublished - 2015 2 26
外部発表はい
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
継続期間: 2015 1 182015 1 22

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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